UNIVERSITY OF OREGON
Grant: $750,000 - National Science Foundation - Aug. 26, 2009
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Award Description: These funds are for a Dual-Beam Focused Ion Beam (DB-FIB) instrument configured to meet the needs of a wide range of research projects as well as to complement our state-of-the-art transmission electron microscopy (TEM) facility. The main features of a DB-FIB are an electron beam that can be used for scanning-electron microscopy as well as for electron-beam lithography, a focused ion beam that can be used for milling and cutting, and deposition chemistries that deposit a variety of materials near the immediate region of the electron and/or ion beam. Combining sample manipulation and high-resolution deposition and imaging in the same instrument is an extremely powerful combination that is indispensable in nanofabrication and material characterization. The instrument is an FEI Company Helios NanoLab DB-FIB with a Schottky field emitter electron source and field emission focused ion beam optics with a liquid metal Gallium ion emitter. The instrument will also be equipped with Pt, XeF2, and Selective Carbon Mill gas injection systems, Omniprobe micromanipulators, solid state STEM detector, cryo transfer system, charge neutralizer, and software packages to aid in automated usage of the instrument. This instrument will fill a critical gap in our suite of major research instrumentation and will complement a recently acquired FEI Titan HR-TEM. Intellectual Merit. The tool enables TEM sample preparation for many organic and inorganic materials, fabrication of nano-optic and nano-electronic devices, and 3-D imaging. Specifically, the instrument serves eight research projects across materials science, physics, chemistry, geology and anthropology at the University of Oregon and at Oregon State University as a nanofabrication tool (e.g. to prepare photonic devices, cavity QED systems, samples of magnetic materials for x-ray characterization, and advanced thermoelectric materials), and to aid in TEM and SEM characterization by creating cross-sections of doped polymer materials, unique carbon microspheres, and nanolaminates. Broader impact. The instrument provides training opportunities across a broad spectrum of research and educational environments and for an exceedingly diverse collection of students, faculty, and industrial partners. The UO integrates its research infrastructure with its educational programs to increase the impact of the CAMCOR facilities both on campus and throughout the region. On-campus, the instrument will enhance the education of approximately 70 graduate students and 25 undergraduates annually. In addition, camps, workshops, and remote access (UO NanoNet) options enable the impact of the facilities to be extended beyond the campus. Examples of the educational programs that attract participants to the facility and instruments are: a graduate-level Techniques in Electron Microscopy course, the analytical instrumentation modules in our Graduate Internship Program, undergraduate research immersion opportunities such as the NSF Solid State and Materials Chemistry Summer Program for Undergraduates ('Rock' Camp), the NSF STEP funded UCORE summer internship program for undergraduates from community colleges, and advanced instrumentation workshops for faculty, students, and industrial collaborators. Examples of programs that extend the impact of the instrumentation are the use of the instrument through remote viewing access in (a) the Technician Training Program within the Advanced Manufacturing and Technology Institute at Chemeketa Community College and (b) the remote instructional use of the proposed instrument and other CAMCOR equipment.
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Project Status: Not Started
This award's data was last updated on Aug. 26, 2009. Help expand these official descriptions using the wiki below.
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